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Kapusi, Daniel [Author]; Machleidt, Torsten [Author]; Franke, Karl-Heinz [Author]; Manske, Eberhard [Author]; Jahn, Rainer [Author] ; Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau, Faculty of Computer Science and Automation [Contributor]; 52 (Ilmenau) : 2007.09.10-13 [Contributor]

Measuring large areas by white light interferometry at the nanopositioning and nanomeasuring machine (NPMM)

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  • Media type: Text; E-Article
  • Title: Measuring large areas by white light interferometry at the nanopositioning and nanomeasuring machine (NPMM)
  • Contributor: Kapusi, Daniel [Author]; Machleidt, Torsten [Author]; Franke, Karl-Heinz [Author]; Manske, Eberhard [Author]; Jahn, Rainer [Author]
  • Published: Digital Library Thüringen, 2007-09-11
  • Language: English
  • Keywords: 52. IWK (2007) ; ScholarlyArticle ; für Harvesting bereitgestellt ; article ; Klasse A
  • Origination:
  • Footnote: Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.
  • Access State: Open Access