• Media type: E-Article
  • Title: Growth of homoepitaxial strontium titanate thin films by molecular-beam epitaxy
  • Contributor: Brooks, C.M. [Author]; Fitting Kourkoutis, L. [Author]; Heeg, T. [Author]; Schubert, J. [Author]; Muller, D.A. [Author]; Schlom, D.G. [Author]
  • imprint: American Institute of Physics, 2009
  • Published in: Applied physics letters 94, 162905 (2009). doi:10.1063/1.3117365
  • Language: English
  • DOI: https://doi.org/10.1063/1.3117365
  • ISSN: 0003-6951
  • Keywords: reflection high energy electron diffraction ; stoichiometry ; X-ray diffraction ; molecular beam epitaxial growth ; strontium compounds ; epitaxial layers ;
  • Origination:
  • Footnote: Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.
  • Description: We report the structural properties of homoepitaxial (100) SrTiO3 films grown by reactive molecular-beam epitaxy (MBE). The lattice spacing and x-ray diffraction (XRD) rocking curves of stoichiometric MBE-grown SrTiO3 films are indistinguishable from the underlying SrTiO3 substrates. Off-stoichiometry for both strontium-rich and strontium-poor compositions (i.e., Sr1+xTiO3+delta films with -0.2 < x < 0.2) results in lattice expansion with significant changes to the shuttered reflection high-energy electron diffraction oscillations, XRD, and film microstructure. The dependence of lattice spacing on nonstoichiometry is smaller for MBE-grown films than for homoepitaxial (100) Sr1+xTiO3+delta films prepared by pulsed-laser deposition or sputtering.
  • Access State: Open Access