Poghossian, A.
[Author];
Schumacher, K.
[Author];
Kloock, J. P.
[Author];
Rosenkranz, C.
[Author];
Schultze, J. W.
[Author];
Müller-Veggian, M.
[Author];
Schöning, M. J.
[Author]
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
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Media type:
E-Article
Title:
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
Contributor:
Poghossian, A.
[Author];
Schumacher, K.
[Author];
Kloock, J. P.
[Author];
Rosenkranz, C.
[Author];
Schultze, J. W.
[Author];
Müller-Veggian, M.
[Author];
Schöning, M. J.
[Author]
imprint:
MDPI, 2006
Published in:Sensors 6, 397 - 404 (2006). doi:10.3390/s6040397
Footnote:
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Description:
A wafer-level functionality testing and characterisation system for ISFETs ( ion-sensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of "good" ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer- level testing of further electrochemical sensors.