Xie, Jie
[Author];
Oudenhoven, Jos. F. M.
[Author];
Dongjiang, Li
[Author];
Chunguang, Chen
[Author];
Eichel, Rüdiger-A.
[Author];
Notten, Peter H. L.
[Author]
High Power and High Capacity 3D-Structured TiO2 Electrodes forLithium-Ion Microbatteries
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Media type:
E-Article
Title:
High Power and High Capacity 3D-Structured TiO2 Electrodes forLithium-Ion Microbatteries
Contributor:
Xie, Jie
[Author];
Oudenhoven, Jos. F. M.
[Author];
Dongjiang, Li
[Author];
Chunguang, Chen
[Author];
Eichel, Rüdiger-A.
[Author];
Notten, Peter H. L.
[Author]
Published:
Electrochemical Soc., 2016
Published in:Journal of the Electrochemical Society 163(10), A2385-A2389 (2016). doi:10.1149/2.1141610jes
Language:
English
DOI:
https://doi.org/10.1149/2.1141610jes
ISSN:
0013-4651
Origination:
Footnote:
Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.
Description:
An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was demonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor deposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film electrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity of a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power and cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly structured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density.