Media type: E-Book; Thesis Title: Dynamic parameter identification techniques and test structures for microsystems characterization on wafer level Contributor: Shaporin, Alexey [Author] Published: Chemnitz: Univ.-Verl., 2009 Online-Ausg.:, [Chemnitz]: [Bibliothek der Techn. Univ.], 2009 Extent: 184 S.; Ill., graph. Darst; 22 cm Language: English ISBN: 9783941003095 Identifier: Keywords: Mikrosystemtechnik > Wafer > Layout > Parameteridentifikation > Eigenfrequenz > Toleranzanalyse Type of reproduction: Online-Ausg.: Place of reproduction: [Chemnitz]: [Bibliothek der Techn. Univ.], 2009 Reproduction note: [Online-Ausg.] Origination: University thesis: Zugl.: Chemnitz, Techn. Univ., Diss., 2009 Footnote: Access State: Open Access