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Media type:
E-Book;
Thesis
Title:
Rare earth oxide thin films from solution based inorganic precursor deposition as potential candidates for insulators in advanced gate stacks
:
deposition mechanism and performance studies [[Elektronische Ressource]]
Other titles:
Selten-Erd-Oxid Dünnschichten aus lösungsbasierter, anorganischer Precursorabscheidung als potentielle Kandidaten für Isolatoren in zukünftigen Transistorsteuerelektroden Anwendungen