Media type: E-Book Title: Theoretical investigation of scanning probe lithography in field-emission mode Contributor: Lenk, Steve [Author]; Rangelow, Ivo W. [Degree supervisor]; Lützenkirchen-Hecht, Dirk [Other]; Groves, Timothy [Other] Published: Ilmenau: TU Ilmenau, 2019 Extent: Online-Ressource Language: English Identifier: Keywords: Miniaturisierung Origination: University thesis: Dissertation, Ilmenau, TU Ilmenau, 2019 Footnote: Access State: Open Access