Media type: E-Book Title: Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching Contributor: Dallorto, Stefano [Verfasser]; Rangelow, Ivo W. [Akademischer Betreuer]; Schwartzberg, Adam [Gutachter]; Strehle, Steffen [Gutachter] imprint: Ilmenau: TU Ilmenau, 2020 Extent: Online-Ressource Language: English Identifier: Keywords: Etching ; Atomic layer deposition ; Halbleitertechnologie Origination: University thesis: Dissertation, Ilmenau, TU Ilmenau, 2019 Footnote: Access State: Open Access