Media type: E-Book Title: Fully integrated transducer platform with cavity optomechanical readout Contributor: Michels, Thomas [Verfasser]; Rangelow, Ivo W. [Akademischer Betreuer]; Gotszalk, Teodor Pawel [Gutachter]; Moheimani, Reza [Gutachter] imprint: Ilmenau: TU Ilmenau, 2020 Extent: Online-Ressource Language: English Identifier: Keywords: Michels, Thomas 1892-1979 ; Mikrosystemtechnik Origination: University thesis: Dissertation, Ilmenau, TU Ilmenau, 2019 Footnote: Access State: Open Access