Media type: E-Book Title: Cycle Time Estimation in a Semiconductor Wafer Fab: A concatenated Machine Learning Approach Contributor: Schelthoff, Kai [Author]; Furmans, Kai [Degree supervisor]; Adan, Ivo [Degree supervisor] Published: Karlsruhe: KIT-Bibliothek, 2023 Extent: Online-Ressource Language: English DOI: 10.5445/IR/1000161561 Identifier: Keywords: Semiconductor manufacturing ; machine learning ; simulation ; wafer manufacturing ; random forest ; regression ; cycle time estimation ; waiting time estimation Origination: University thesis: Dissertation, Karlsruhe, Karlsruher Institut für Technologie (KIT), 2023 Footnote: Access State: Open Access