Media type: E-Book Title: Plasma based 2.5D+ micro and nanostructuring for whispering gallery mode resonators Contributor: Behrens, Arne [Author]; Sinzinger, Stefan [Degree supervisor]; Hentschel, Martina [Degree supervisor]; Strehle, Steffen [Degree supervisor] Published: Ilmenau: TU Ilmenau, 2024 Extent: Online-Ressource Language: English Identifier: Keywords: Optischer Resonator ; Plasmaätzen ; Lithografie ; Mikrooptik Origination: University thesis: Dissertation, Ilmenau, TU Ilmenau, 2023 Footnote: Access State: Open Access Rights information: Attribution - Share Alike (CC BY-SA)