Media type: E-Book; Thesis Title: Characterisation of Si-Si bonded wafers and low-k silica xerogel films by means of optical spectroscopies Contributor: Himcinschi, Cameliu Constantin [Verfasser] Extent: Online-Ressource Language: English Identifier: Keywords: Silicium > Wafer > Bonden > Vergrabene Schicht > Infrarotspektroskopie > Online-Publikation Siliciumdioxid > Xerogel > Porosität > FT-IR-Spektroskopie > Ellipsometrie > Online-Publikation Origination: University thesis: Chemnitz, Techn. Univ., Diss., 2003 Footnote: Dateiformat: PDF Access State: Open Access