Media type: E-Book; Thesis Title: Design and investigation of microelectromechanical (MEMS) varactors Contributor: Shakhray, Maxim [Author] Extent: Online-Ressource Language: English Identifier: Keywords: Varaktor > MEMS > Online-Publikation Origination: University thesis: Kiel, Univ., Diss., 2005 Footnote: Access State: Open Access