Media type: E-Book; Thesis Title: Phase formation and size effects in nanoscale silicide layers for the sub-100 nm microprocessor technology Contributor: Rinderknecht, Jochen [Verfasser] Extent: Online-Ressource Language: English Identifier: Keywords: CMOS ; Dünne Schicht ; Mikroprozessor ; Schichtdicke ; Silicide ; Hochschulschrift Origination: University thesis: Dresden, Techn. Univ., Diss., 2005 Footnote: Access State: Open Access