Media type: E-Book Title: CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms Contributor: Li, Flora M. [Other]; Nathan, Arokia [Other] imprint: Berlin, Heidelberg: Springer Berlin Heidelberg, 2005 Published in: Microtechnology and Mems SpringerLink ; Bücher Extent: Online-Ressource (XI, 231 p. 84 illus, digital) Language: English DOI: 10.1007/b139047 ISBN: 9783540274124 Identifier: Keywords: CCD-Sensor > Excimerlaser > Tiefes Ultraviolett > Siliciumdioxid > Strahlenschaden > Degradation Origination: Footnote: