Media type: E-Article Title: Fenton reaction chemical mechanical polishing liquid composition optimization of polishing GaN wafer Contributor: Jiewen YAN; Jiabin LU; Yinli HUANG; Jisheng PAN; Qiusheng YAN Published: 2022 Published in: Jin'gangshi yu moliao moju gongcheng, 42 (2022) 5, Seite 610-616 Language: Chinese DOI: 10.13394/j.cnki.jgszz.2022.5001 ISSN: 1006-852X Origination: Footnote: Access State: Open Access