Description:
<jats:p>Using our dedicated Auger depth profiling device (applying a grazing angle of incidence 84° and low ion energy 1 keV of Ar and specimen rotation), we could detect a thin oxide layer buried by about a 180 nm thick layer. Due to the good depth resolution achieved, the oxide layer could be localized to the interface. The oxide layer thickness was determined for two independent specimens to be about 2 and 3 ML.</jats:p>