• Media type: Electronic Conference Proceeding
  • Title: Metrology Of Silicide Contacts For Future CMOS
  • Contributor: Zollner, Stefan; Gregory, Richard B.; Kottke, M. L.; Vartanian, Victor; Wang, Xiang-Dong; Theodore, David; Fejes, P. L.; Conner, J. R.; Raymond, Mark; Zhu, Xiaoyan; Denning, Dean; Bolton, Scott; Chang, Kyuhwan; Noble, Ross; Jahanbani, Mohamad; Rossow, Marc; Goedeke, Darren; Filipiak, Stan; Garcia, Ricardo; Jawarani, Dharmesh; Taylor, Bill; Nguyen, Bich-Yen; Crabtree, P. E.; Thean, Aaron; [...]
  • imprint: AIP, 2007
  • Published in: AIP Conference Proceedings
  • Extent:
  • Language: Not determined
  • DOI: 10.1063/1.2799394
  • ISSN: 0094-243X
  • Origination:
  • Footnote: