• Media type: E-Article
  • Title: Dewetting of Au and AuPt alloy films: A dewetting zone model
  • Contributor: Manuela Müller, Claudia; Spolenak, Ralph
  • imprint: AIP Publishing, 2013
  • Published in: Journal of Applied Physics
  • Language: English
  • DOI: 10.1063/1.4794028
  • ISSN: 0021-8979; 1089-7550
  • Origination:
  • Footnote:
  • Description: <jats:p>When thin metal films are annealed they can degrade into particles. This happens even at annealing temperatures below the melting point and is known as solid-state dewetting or agglomeration. The solid-state dewetting behaviour of 15–35 nm thick Au and 20 nm thick AuPt films on SiNx/SiO2/Si substrates was investigated in the temperature range of 500–900 °C in air. Morphology maps were created based on which a dewetting zone model is proposed. The morphology maps can be divided into three zones: a zone where the film remains continuous, a zone where dewetting takes place, and a zone where dewetting is complete. Coverage measurements can be used to determine zone boundaries and the activation energy for void growth, which was 1.05 ± 0.1 eV in the case of Au. The influence of film thickness and alloying on the dewetting behaviour was studied; both factors had only an influence at low annealing temperatures, with the influence of alloying being more pronounced than the influence of film thickness.</jats:p>