Description:
<jats:p>The development of H− multicusp ion sources has been carried out at China Institute of Atomic Energy (CIAE) for more than ten years. The first H− ion source with 5.2 mA was made in 2002. After improving the configured magnetic field, a H− ion source of 10 mA was made in 2004, and the beam intensity of 15 mA was obtained in 2008 after further improvements of the filter field. The beam intensity of 18 mA was achieved in 2010 following the in-depth study and optimization on some essential operation conditions. Now a series of H− cusp sources with different sizes and beam intensity ranging from 3 mA to 18 mA have been successfully developed at CIAE. All the ion sources can fast finish the test on the test stand now, since all the connections are modularized and can fit all kinds of H− mulitcusp source of CIAE. The development status of the various H− multicusp ion sources at CIAE are presented in the paper.</jats:p>