• Media type: E-Article
  • Title: High quality factor indium oxide mechanical microresonators
  • Contributor: Bartolomé, Javier; Cremades, Ana; Piqueras, Javier
  • Published: AIP Publishing, 2015
  • Published in: Applied Physics Letters, 107 (2015) 19
  • Language: English
  • DOI: 10.1063/1.4935708
  • ISSN: 0003-6951; 1077-3118
  • Origination:
  • Footnote:
  • Description: The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than 105 and minimum detectable forces of the order of 10−16 N/Hz1/2 demonstrate their potential as mechanical microresonators for real applications. Measurements at low-vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.