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Media type:
E-Article
Title:
High quality factor indium oxide mechanical microresonators
Contributor:
Bartolomé, Javier;
Cremades, Ana;
Piqueras, Javier
Published:
AIP Publishing, 2015
Published in:
Applied Physics Letters, 107 (2015) 19
Language:
English
DOI:
10.1063/1.4935708
ISSN:
0003-6951;
1077-3118
Origination:
Footnote:
Description:
The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than 105 and minimum detectable forces of the order of 10−16 N/Hz1/2 demonstrate their potential as mechanical microresonators for real applications. Measurements at low-vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.