Media type: E-Article Title: Prospects for metal/non-metal microsystems: sensors, sources and switches Contributor: PAGNIA, H. Published: Informa UK Limited, 1992 Published in: International Journal of Electronics, 73 (1992) 5, Seite 819-825 Language: English DOI: 10.1080/00207219208925715 ISSN: 0020-7217; 1362-3060 Keywords: Electrical and Electronic Engineering Origination: Footnote: