Media type: E-Article Title: Investigation of the adhesion of perforated MEMS clamped–clamped beams based on the GaAs MMIC process with the resonant method Contributor: Wang, Kaiyue; Liao, Xiaoping; Zhang, Zhiqiang Published: Informa UK Limited, 2015 Published in: Journal of Adhesion Science and Technology, 29 (2015) 16, Seite 1663-1679 Language: English DOI: 10.1080/01694243.2015.1037075 ISSN: 1568-5616; 0169-4243 Keywords: Materials Chemistry ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Mechanics of Materials ; General Chemistry Origination: Footnote: