Media type: E-Article Title: Metal Silicides in CMOS Technology: Past, Present, and Future Trends Contributor: Zhang, Shi-Li; Östling, Mikael imprint: Informa UK Limited, 2003 Published in: Critical Reviews in Solid State and Materials Sciences Language: English DOI: 10.1080/10408430390802431 ISSN: 1040-8436; 1547-6561 Keywords: Electrical and Electronic Engineering ; Physical and Theoretical Chemistry ; Condensed Matter Physics ; General Chemical Engineering ; Electronic, Optical and Magnetic Materials Origination: Footnote: