Media type: E-Article Title: Recent developments in plasma assisted physical vapour deposition Contributor: Schneider, Jochen M; Rohde, Suzanne; Sproul, William D; Matthews, Allan imprint: IOP Publishing, 2000 Published in: Journal of Physics D: Applied Physics, 33 (2000) 18, Seite R173-R186 Language: Not determined DOI: 10.1088/0022-3727/33/18/201 ISSN: 0022-3727; 1361-6463 Origination: Footnote: