Media type: E-Article Title: Nanoscale fabrication using single-ion impacts Contributor: Millar, Victoria; Pakes, Chris I; Cimmino, Alberto; Brett, David; Jamieson, David N; Prawer, Steven; Yang, Changyi J; Rout, B; McKinnon, Rita P; Dzurak, Andrew S; Clark, Robert G imprint: IOP Publishing, 2002 Published in: Smart Materials and Structures Language: Not determined DOI: 10.1088/0964-1726/11/5/310 ISSN: 0964-1726 Keywords: Electrical and Electronic Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science ; Atomic and Molecular Physics, and Optics ; Civil and Structural Engineering ; Signal Processing Origination: Footnote: