• Media type: E-Article
  • Title: Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding
  • Contributor: Fu, C; Rummler, Z; Schomburg, W
  • Published: IOP Publishing, 2003
  • Published in: Journal of Micromechanics and Microengineering, 13 (2003) 4, Seite S96-S102
  • Language: Without Specification
  • DOI: 10.1088/0960-1317/13/4/316
  • ISSN: 0960-1317; 1361-6439
  • Origination:
  • Footnote: