Media type: E-Article Title: Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding Contributor: Fu, C; Rummler, Z; Schomburg, W Published: IOP Publishing, 2003 Published in: Journal of Micromechanics and Microengineering, 13 (2003) 4, Seite S96-S102 Language: Without Specification DOI: 10.1088/0960-1317/13/4/316 ISSN: 0960-1317; 1361-6439 Origination: Footnote: