Media type: E-Article Title: Femtosecond laser micromachining of silicon with an external electric field Contributor: Zheng, H Y; Jiang, Z W Published: IOP Publishing, 2010 Published in: Journal of Micromechanics and Microengineering, 20 (2010) 1, Seite 017001 Language: Not determined DOI: 10.1088/0960-1317/20/1/017001 ISSN: 0960-1317; 1361-6439 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials Origination: Footnote: