Nordquist, Christopher D;
Branch, Darren W;
Pluym, Tammy;
Choi, Sukwon;
Nguyen, Janet H;
Grine, Alejandro;
Dyck, Christopher W;
Scott, Sean M;
Sing, Molly N;
Olsson, Roy H
MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
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Media type:
E-Article
Title:
MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
Contributor:
Nordquist, Christopher D;
Branch, Darren W;
Pluym, Tammy;
Choi, Sukwon;
Nguyen, Janet H;
Grine, Alejandro;
Dyck, Christopher W;
Scott, Sean M;
Sing, Molly N;
Olsson, Roy H
imprint:
IOP Publishing, 2016
Published in:Journal of Micromechanics and Microengineering