Media type: E-Article Title: Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma Contributor: Marton, Marian; Ritomsky, Mario; Rehacek, Vlastimil; Michniak, Pavol; Behul, Miroslav; Novak, Patrik; Vanco, Lubomir; Vojs, Marian imprint: IOP Publishing, 2019 Published in: Journal of Micromechanics and Microengineering Language: Not determined DOI: 10.1088/1361-6439/ab4d6f ISSN: 0960-1317; 1361-6439 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials Origination: Footnote: