• Media type: E-Article
  • Title: A robust rotation-invariance displacement measurement method for a micro-/nano-positioning system
  • Contributor: Zhang, Xiang; Zhang, Xianmin; Wu, Heng; Li, Hai; Gan, Jinqiang
  • Published: IOP Publishing, 2018
  • Published in: Measurement Science and Technology, 29 (2018) 5, Seite 055402
  • Language: Not determined
  • DOI: 10.1088/1361-6501/aaa560
  • ISSN: 0957-0233; 1361-6501
  • Origination:
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