Media type: E-Article Title: High-performance SiGe HBTs for next generation BiCMOS technology Contributor: Rücker, Holger; Heinemann, Bernd Published: IOP Publishing, 2018 Published in: Semiconductor Science and Technology, 33 (2018) 11, Seite 114003 Language: Not determined DOI: 10.1088/1361-6641/aade64 ISSN: 0268-1242; 1361-6641 Origination: Footnote: