• Media type: E-Article
  • Title: Direct ion content measurements in a non-sputtering magnetron discharge
  • Contributor: Kaziev, A.V.; Kolodko, D.V.; Ageychenkov, D.G.; Tumarkin, A.V.; Kharkov, M.M.; Stepanova, T.V.
  • imprint: IOP Publishing, 2019
  • Published in: Journal of Instrumentation
  • Language: Not determined
  • DOI: 10.1088/1748-0221/14/09/c09004
  • ISSN: 1748-0221
  • Keywords: Mathematical Physics ; Instrumentation
  • Origination:
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