Media type: E-Article Title: Mass spectroscopy of the ion flux produced during inductively coupled plasma nitriding process Contributor: Kolodko, D V; Kaziev, A V; Ageychenkov, D G; Meshcheryakova, E A; Pisarev, A A; Tumarkin, A V imprint: IOP Publishing, 2017 Published in: Journal of Physics: Conference Series Language: Not determined DOI: 10.1088/1742-6596/830/1/012064 ISSN: 1742-6588; 1742-6596 Keywords: General Physics and Astronomy Origination: Footnote: Access State: Open Access