Media type: E-Article Title: Microstructuring of Molecularly Thin Polymer Layers by Photolithography Contributor: Prucker, Oswald; Schimmel, Martin; Tovar, Günter; Knoll, Wolfgang; Rühe, Jürgen imprint: Wiley, 1998 Published in: Advanced Materials Language: Not determined DOI: 10.1002/(sici)1521-4095(199810)10:14<1073::aid-adma1073>3.3.co;2-4 ISSN: 0935-9648; 1521-4095 Keywords: Mechanical Engineering ; Mechanics of Materials ; General Materials Science Origination: Footnote: