Media type: E-Article Title: PECVD‐Partikelbeschichtungen in einer Plasma‐Wirbelschicht Contributor: Bayer, Christian; Karches, Martin; Atthews, Andrew; Rohr, Philipp Rudolf Von Published: Wiley, 1998 Published in: Chemie Ingenieur Technik, 70 (1998) 6, Seite 727-730 Language: English DOI: 10.1002/cite.330700611 ISSN: 1522-2640; 0009-286X Keywords: Industrial and Manufacturing Engineering ; General Chemical Engineering ; General Chemistry Origination: Footnote: