Published in:
Journal of the Society for Information Display, 29 (2021) 1, Seite 47-56
Language:
English
DOI:
10.1002/jsid.962
ISSN:
1071-0922;
1938-3657
Origination:
Footnote:
Description:
<jats:title>Abstract</jats:title><jats:p>An active matrix monolithic micro‐LED full‐color micro‐display with a pixel density of 317 ppi is demonstrated. Starting from large‐scale and low‐cost GaN‐on‐Si epilayers, monolithic 64 × 36 blue micro‐LED arrays are fabricated and further transformed to full‐color micro‐displays by applying a photo‐patternable color conversion layer. This full‐color fabrication scheme shows feasible manufacturability, suggesting a potential for volume production of micro‐LED full‐color micro‐display.</jats:p>