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Media type:
E-Article
Title:
Long-throw magnetron sputtering of amorphous Zn-Sn-O thin films at room temperature : Long-throw sputtering of ZTO
:
Long-throw sputtering of ZTO
Contributor:
Frenzel, Heiko;
Dörfler, Tobias;
Schlupp, Peter;
von Wenckstern, Holger;
Grundmann, Marius
Published:
Wiley, 2015
Published in:
physica status solidi (a), 212 (2015) 7, Seite 1482-1486