Media type: E-Article Title: Interstitial type defects in ion implanted silicon Contributor: Berezhnov, N. I.; Stelmakh, V. F.; Chelyadinskii, A. R. Published: Wiley, 1983 Published in: Physica Status Solidi (a), 78 (1983) 2, Seite K121-K125 Language: German DOI: 10.1002/pssa.2210780254 ISSN: 0031-8965; 1521-396X Keywords: Condensed Matter Physics ; Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: