Media type: E-Article Title: Diffusion of Boron Implanted into Silicon Contributor: Stelmakh, V. F.; Suprun-Belevich, Yu. R.; Tkachev, V. D.; Chelyadinskii, A. R. Published: Wiley, 1985 Published in: physica status solidi (a), 89 (1985) 1, Seite K45-K49 Language: German DOI: 10.1002/pssa.2210890155 ISSN: 0031-8965; 1521-396X Keywords: Condensed Matter Physics ; Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: