Media type: E-Article Title: Nitrogen profile modification in high dose implantation synthesis of silicon nitride Contributor: Sobeslavsky, E.; Jäger, H. U.; Kreissig, U.; Skorupa, W.; Wollschläger, K. imprint: Wiley, 1988 Published in: Physica Status Solidi (a) Language: German DOI: 10.1002/pssa.2211050209 ISSN: 0031-8965; 1521-396X Keywords: Condensed Matter Physics ; Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: