Media type: E-Article Title: Improvement of the detection system in the soft X‐ray absorption spectroscopy Contributor: Nakanishi, Koji; Ohta, Toshiaki Published: Wiley, 2012 Published in: Surface and Interface Analysis, 44 (2012) 6, Seite 784-788 Language: English DOI: 10.1002/sia.3870 ISSN: 0142-2421; 1096-9918 Keywords: Materials Chemistry ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Condensed Matter Physics ; General Chemistry Origination: Footnote: Description: A unique soft X‐ray absorption spectroscopy detection system has been developed for depth profiling analysis of a sample with combined different detection methods: total electron yield, partial electron yield (PEY), and partial fluorescent X‐ray yield. We found that a PEY spectrum measured with a conventional microchannel plate detector is sometimes deformed by inclusion of unexpected fluorescent X‐rays. In this system, a new PEY detector has been designed and constructed to overcome the aforementioned problem. In addition, the developed PEY detector successfully works with higher surface sensitivity and higher signal‐to‐background ratio than the total electron yield method recorded by a sample drain current. Combining this PEY detector with a sample drain current recorder and a silicon drift detector, we have established a useful soft X‐ray absorption spectroscopy detection system to probe surface, interface, and bulk of a sample simultaneously. Copyright © 2011 John Wiley & Sons, Ltd.