Media type: E-Article Title: Molecular ion implantation in silicon Contributor: Markwitz, Andreas; Baumann, Horst; Michelmann, Rolf W.; Meyer, J�rg D.; Krimmel, Eberhard F.; Bethge, Klaus imprint: Springer Science and Business Media LLC, 1997 Published in: Mikrochimica Acta Language: English DOI: 10.1007/bf01246204 ISSN: 1436-5073; 0026-3672 Keywords: Analytical Chemistry Origination: Footnote: