Media type: E-Article Title: A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers Contributor: Engesser, Manuel; Franke, Axel R.; Maute, Matthias; Meisel, Daniel C.; Korvink, Jan G. imprint: Springer Science and Business Media LLC, 2010 Published in: Microsystem Technologies Language: English DOI: 10.1007/s00542-009-0973-4 ISSN: 0946-7076; 1432-1858 Keywords: Electrical and Electronic Engineering ; Hardware and Architecture ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: