Media type: E-Article Title: Applying SU-8™ to the fabrication of micro electro discharge machining electrodes Contributor: Traisigkhachol, Ornwasa; Schmid, Hermann; Wurz, Marc; Gatzen, Hans H. imprint: Springer Science and Business Media LLC, 2010 Published in: Microsystem Technologies Language: English DOI: 10.1007/s00542-009-1011-2 ISSN: 0946-7076; 1432-1858 Keywords: Electrical and Electronic Engineering ; Hardware and Architecture ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials Origination: Footnote: