Media type: E-Article Title: Effects of a power and photon energy of incident light on near-field etching properties Contributor: Yatsui, T.; Saito, H.; Nishioka, K.; Leuschel, B.; Soppera, O.; Nobusada, K. imprint: Springer Science and Business Media LLC, 2017 Published in: Applied Physics A Language: English DOI: 10.1007/s00339-017-1361-z ISSN: 0947-8396; 1432-0630 Keywords: General Materials Science ; General Chemistry Origination: Footnote: