Media type: E-Article Title: Plasma exposure inducing crystallization of indium oxide film with improved electrical and mechanical properties at room temperature Contributor: Yang, Lei; Zhu, Jiaqi; Bai, Jie; Zhu, Yuankun; Dai, Bing; Yu, Hailing; Jia, Zhenyu; Han, Jiecai imprint: Springer Science and Business Media LLC, 2014 Published in: Journal of Materials Science Language: English DOI: 10.1007/s10853-014-8314-0 ISSN: 1573-4803; 0022-2461 Keywords: Mechanical Engineering ; Mechanics of Materials ; General Materials Science Origination: Footnote: