• Media type: E-Article
  • Title: A classification scheme for visual defects arising in semiconductor wafer inspection
  • Contributor: Ravishankar Rao, A.; Jain, Ramesh
  • imprint: Elsevier BV, 1990
  • Published in: Journal of Crystal Growth
  • Language: English
  • DOI: 10.1016/0022-0248(90)90217-9
  • ISSN: 0022-0248
  • Keywords: Materials Chemistry ; Inorganic Chemistry ; Condensed Matter Physics
  • Origination:
  • Footnote: