Media type: E-Article Title: A classification scheme for visual defects arising in semiconductor wafer inspection Contributor: Ravishankar Rao, A.; Jain, Ramesh imprint: Elsevier BV, 1990 Published in: Journal of Crystal Growth Language: English DOI: 10.1016/0022-0248(90)90217-9 ISSN: 0022-0248 Keywords: Materials Chemistry ; Inorganic Chemistry ; Condensed Matter Physics Origination: Footnote: