Media type: E-Article Title: Processes of defect formation in epitaxial semiconductor films Contributor: Stenin, S.I. Published: Elsevier BV, 1984 Published in: Thin Solid Films, 116 (1984) 1-3, Seite 99-110 Language: English DOI: 10.1016/0040-6090(84)90405-x ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: