Media type: E-Article Title: Process characterization with d.c. magnetron sputtering of CrSiC thin films in ArCH4 mixtures Contributor: Sobe, Gerhard; Neelmeijer, Antje; Weise, Günter; Heinrich, Armin imprint: Elsevier BV, 1991 Published in: Thin Solid Films Language: English DOI: 10.1016/0040-6090(91)90159-u ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: